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Pd/Cr Gates for a MIS Type Hydrogen Sensor

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dc.contributor.author Zhang, Linfeng en_US
dc.contributor.author McCullen, Erik F. en_US
dc.contributor.author Rahman, Md H. en_US
dc.contributor.author Baird, Ron J. en_US
dc.contributor.author Naik, Ratna en_US
dc.contributor.author Rimai, Lajos en_US
dc.contributor.author Auner, Gregory W. en_US
dc.contributor.author Ng, K.Y. Simon en_US
dc.date.accessioned 2014-07-16T16:53:50Z
dc.date.available 2014-07-16T16:53:50Z
dc.date.issued 2004-11-07 en_US
dc.identifier.uri https://scholarworks.bridgeport.edu/xmlui/handle/123456789/714
dc.description.abstract Instead of the pure Pd gates in MIS type hydrogen sensor, Pd-Cr alloy gates with different composition and structure were used to improve the sensors performance. The use of Pd-Cr alloy not only extended the dynamic range from 100 ppm to 50,000 ppm of hydrogen, but also showed quick response. The dynamic range and sensitivity were related to the nature of metal outer surface and the metal/insulator interface respectively. en_US
dc.language.iso en_US en_US
dc.publisher American Institute of Chemical Engineers en_US
dc.subject Engineering en_US
dc.subject Hydrogen sensor en_US
dc.subject Palladium chromium (Pd/Cr) alloy en_US
dc.title Pd/Cr Gates for a MIS Type Hydrogen Sensor en_US
dc.type Article en_US
dc.event.location Austin, TX en_US
dc.event.name 2004 American Institute of Chemical Engineers Annual Meeting en_US


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