Zou, Qiang; Lu, Deren; Li, Baoqing; Xiong, Xingguo; Xiong, Bin; Wang, Weiyuan
(SPIE, 1997-09-29)
A novel KOH silicon maskless anisotropic etching technology is adopted to fabricate micromachining silicon mass-beam structure accelerometer. Lateral sensitivity effect in normal accelerometer is eliminated because the ...