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Browsing Engineering Proceedings by Subject "Fracture probability"

Browsing Engineering Proceedings by Subject "Fracture probability"

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  • Xiong, Xingguo; Wu, Yu-Liang; Jone, Wen-Ben (IEEE, 2008-12-05)
    MEMS (Microelectromechanical System) yield and reliability have been a very critical issue. In our previous paper, we have proposed a self-repairable MEMS comb accelerometer device, and the yield analysis has demonstrated ...

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