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Browsing Engineering Proceedings by Subject "Floating interconnect"

Browsing Engineering Proceedings by Subject "Floating interconnect"

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  • Xiong, Xingguo; Lu, Deren; Wang, Weiyuan (IEEE, 2005-08-07)
    In this paper, a novel silicon-on-glass bulk micromachined comb accelerometer with floating interconnect is introduced. The device uses unique floating back interconnect for the connection of the fixed comb fingers, which ...

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