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Browsing Engineering Proceedings by Subject "Comb accelerometer"

Browsing Engineering Proceedings by Subject "Comb accelerometer"

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  • Xiong, Xingguo; Wu, Yu-Liang; Jone, Wen-Ben (Springer Netherlands, 2010-12-10)
    In this paper, a built-in self-repair technique for the MEMS comb accelerometer device is proposed. The main device of the comb accelerometer consists of n identical modules, and m modules are introduced as the redundancy. ...

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