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Browsing Engineering Proceedings by Subject "Anodic-bonding"

Browsing Engineering Proceedings by Subject "Anodic-bonding"

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  • Xiong, Xingguo; Lu, Deren; Wang, Weiyuan (IEEE, 2005-08-07)
    In this paper, a novel DRIE (Deep Reactive Ion Etching) bulk-micromachined single-crystal silicon comb vibratory microgyroscope is introduced. The device uses glass as substrate so that parasitic capacitance can be alleviated. ...

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