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Browsing Engineering Journal Articles by Author "Zhong, Jichao"

Browsing Engineering Journal Articles by Author "Zhong, Jichao"

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  • Zhong, Jichao; Xiong, Xingguo; Yao, Zheng; Hu, Junling; Patra, Prabir (Springer Netherlands, 2010)
    MEMS micro-mirrors have been widely used in optical communication, projection display, and microscanner, etc. Various MEMS micro-mirror devices have been reported. In this paper, the design of a bulk-micromachined MEMS ...

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