Zhang, Linfeng; McCullen, Erik F.; Rahman, Md H.; Thakur, Jagdish S.; Rimai, Lajos; Baird, Ron J.; Naik, Ratna; Newaz, Golam; Auner, Gregory W.; Ng, K.Y. Simon
(Elsevier, 2006-02-27)
The effect of Cr addition to the gate of a Pd/AlN/Si Hydrogen gas sensor was investigated by modifying the gate composition and structure. A device with a pure Pd gate responds to hydrogen concentrations as low as 1 ppm, ...