UB ScholarWorks

Browsing School of Engineering by Author "Wang, Weiyuan"

Browsing School of Engineering by Author "Wang, Weiyuan"

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  • Balance-Approach For Load-Displacement Measurement Of Microstructures 
    Xiong, Xingguo; Zou, Qiang; Lu, Deren; Wang, Weiyuan (Elsevier Science Ltd., 1998-08-01)
    A simple and effective method using a balance to measure micro force and corresponding deflection is presented. The method is proved to be very practical in testing the force–deflection behavior of silicon cantilever, in ...
  • Balance-approach For Mechanical Properties Test of Micro Fabricated Structure 
    Xiong, Xingguo; Zou, Qiang; Lu, Deren; Wang, Weiyuan (SPIE, 1997-09-29)
    A simple and effective method using a balance to measure micro force and corresponding deflection is presented. The method is proved to be very practical in testing the force-deflection behavior of silicon cantilever, in ...
  • A Bulk-Micromachined Comb Accelerometer With Floating Interconnects 
    Xiong, Xingguo; Lu, Deren; Wang, Weiyuan (IEEE, 2005-08-07)
    In this paper, a novel silicon-on-glass bulk micromachined comb accelerometer with floating interconnect is introduced. The device uses unique floating back interconnect for the connection of the fixed comb fingers, which ...
  • A Bulk-Micromachined Comb Vibratory Microgyroscope Design 
    Xiong, Xingguo; Lu, Deren; Wang, Weiyuan (IEEE, 2005-08-07)
    In this paper, a novel DRIE (Deep Reactive Ion Etching) bulk-micromachined single-crystal silicon comb vibratory microgyroscope is introduced. The device uses glass as substrate so that parasitic capacitance can be alleviated. ...
  • Structure Design and Fabrication of Symmetric Force-balance Micromachining Capacitive Accelerometer 
    Zou, Qiang; Lu, Deren; Li, Baoqing; Xiong, Xingguo; Xiong, Bin; Wang, Weiyuan (SPIE, 1997-09-29)
    A novel KOH silicon maskless anisotropic etching technology is adopted to fabricate micromachining silicon mass-beam structure accelerometer. Lateral sensitivity effect in normal accelerometer is eliminated because the ...

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