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Control Circuitry for Self-Repairable MEMS Accelerometers
Xiong, Xingguo
;
Wu, Yu-Liang
;
Jone, Wen-Ben
(
IEEE
,
2008-12-05
)
Reliability Model for MEMS Accelerometers
Xiong, Xingguo
;
Wu, Yu-Liang
;
Jone, Wen-Ben
(
Springer Netherlands
,
2008
)
Design Optimization of MEMS Comb Accelerometer
Sharma, Kanchan
;
Macwan, Isaac
;
Zhang, Linfeng
;
Hmurcik, Lawrence V.
;
Xiong, Xingguo
(
ASEE
,
2007
)
Fault Simulation of Surface-micromachined MEMS Accelerometer
Karuppannan, Karthikeyan
;
Xiong, Xingguo
;
Zhang, Linfeng
;
Hu, Junling
(
ASEE
,
2009
)
Structure Design and Fabrication of Symmetric Force-balance Micromachining Capacitive Accelerometer
Zou, Qiang
;
Lu, Deren
;
Li, Baoqing
;
Xiong, Xingguo
;
Xiong, Bin
;
Wang, Weiyuan
(
SPIE
,
1997-09-29
)
A Bulk-Micromachined Comb Accelerometer With Floating Interconnects
Xiong, Xingguo
;
Lu, Deren
;
Wang, Weiyuan
(
IEEE
,
2005-08-07
)
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Author
Xiong, Xingguo (6)
Jone, Wen-Ben (2)
Lu, Deren (2)
Wang, Weiyuan (2)
Wu, Yu-Liang (2)
Zhang, Linfeng (2)
Hmurcik, Lawrence V. (1)
Hu, Junling (1)
Karuppannan, Karthikeyan (1)
Li, Baoqing (1)
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Subject
Accelerometer (6)
Micro-electro-mechanical systems (MEMS) (6)
Engineering (5)
Redundancy repair (2)
Bulk-micromachining (1)
Capacitance sensing (1)
Computer engineering (1)
Floating interconnect (1)
Fracture probability (1)
Maskless anisotropic etching (1)
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Date Issued
2000 - 2009 (5)
1997 - 1999 (1)