UB ScholarWorks

Browsing by Subject "Yield"

Browsing by Subject "Yield"

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  • Xiong, Xingguo; Wu, Yu-Liang; Jone, Wen-Ben (Springer Netherlands, 2007)
    In this paper, Monte Carlo method is used for the simulation of point-stiction defects in MEMS accelerometer devices. The yield of MEMS devices is estimated based on the simulation results. Comparison between simulated ...

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