Pd/Cr Gates for a MIS Type Hydrogen Sensor
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Authors
Zhang, Linfeng
McCullen, Erik F.
Rahman, Md H.
Baird, Ron J.
Naik, Ratna
Rimai, Lajos
Auner, Gregory W.
Ng, K.Y. Simon
Issue Date
2004-11-07
Type
Article
Language
en_US
Keywords
Engineering , Hydrogen sensor , Palladium chromium (Pd/Cr) alloy
Alternative Title
Abstract
Instead of the pure Pd gates in MIS type hydrogen sensor, Pd-Cr alloy gates with different composition and structure were used to improve the sensors performance. The use of Pd-Cr alloy not only extended the dynamic range from 100 ppm to 50,000 ppm of hydrogen, but also showed quick response. The dynamic range and sensitivity were related to the nature of metal outer surface and the metal/insulator interface respectively.
Description
Citation
Publisher
American Institute of Chemical Engineers