Design and Optimization of Piezoelectric Dual-Mode Micro-Mirror
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Authors
Zhong, Jichao
Xiong, Xingguo
Yao, Zheng
Hu, Junling
Patra, Prabir
Issue Date
2010
Type
Article
Language
en_US
Keywords
Engineering , Micro-electro-mechanical systems (MEMS) , Dual-mode micro-mirror , Piezoelectric technology , Piston micro-mirror , Torsional micro-mirror
Alternative Title
Abstract
MEMS micro-mirrors have been widely used in optical communication, projection display, and microscanner, etc. Various MEMS micro-mirror devices have been reported. In this paper, the design of a bulk-micromachined MEMS piezoelectric dual-mode micro-mirror is proposed. The working principle of the dual-mode micro-mirror device is analyzed. Based on the analysis, a set of optimized design parameters of the micro-mirror is suggested. Theoretical analysis shows that the proposed micro-mirror can deflect for a maximum displacement of 2.5 μm in its piston mode, and tilt for a maximum angle of 4.88º in its torsional mode. The fabrication flow of the MEMS micro-mirror is also suggested. The proposed micro-mirror has the advantages of large displacement and large tilt angle due to piezoelectric activation. The PZT actuated micro-mirror (PAM) also leads to improved linearity in tilting angle and piston displacement. Further, fast response of the PZT unimorph on the applied actuation voltage ensures wider operation bandwidth of the PAM in contrast to thermal activated micro-mirrors.
Description
The final publication is available at www.springerlink.com
Citation
J. Zhong, X. Xiong, Z. Yao, R. Patra, "Design and Optimization of Piezoelectric Dual-Mode Micro-Mirror," Technological Developments in Networking, Education and Automation, 2010.
Publisher
Springer Netherlands
License
Journal
Volume
Issue
PubMed ID
DOI
ISSN
978-90-481-9150-5