Yield Analysis for Self-Repairable MEMS Devices
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Authors
Wu, Yu-Liang
Jone, Wen-Ben
Issue Date
2005-08-07
Type
Article
Language
Keywords
Yield analysis , Built-in self-repair (BISR) , Micro-electro-mechanical systems (MEMS) , Micro-accelerometer , Redundancy repair , Computer engineering , Computer science , Engineering , Wireless communication
Alternative Title
Abstract
In this paper, the yield analysis for a selfrepairable MEMS (SRMEMS) accelerometer design is proposed. The accelerometer consists of(n+m) identical modules: n of them serve as the main device, while the remaining m modules act as the redundancy. The yield model for MEMS redundancy repair is developed by statistical analysis. Based upon the yield model, the yield increase after redundancy repair for the SRMEMS accelerometer is derived. The yield increase versus initial yield for different m numbers is simulated. The simulation results show that the SRMEMS leads to effective yield increase compared to non-BISRS design, especially for a moderate initial yield.
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Citation
Publisher
IEEE