Introducing The Small World: Developing The Mems/Nanotechnology Curriculum
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Authors
Xiong, Xingguo
Zhang, Linfeng
Hu, Junling
Hmurcik, Lawrence V.
Issue Date
2009
Type
Article
Language
en_US
Keywords
Engineering , Education , Micro-electro-mechanical systems (MEMS) , Nanoelectromechanical system (NEMS) , Nanotechnology
Alternative Title
Abstract
MEMS (Microelectromechanical Systems) and nanotechnology are believed to be the
exciting drive to trigger the next wave of technology revolution. MEMS refer to systems
in micro scale (1 micron to 1 millimeter) that integrates mechanical components, sensors,
actuators, and electronics on a common silicon substrate through micromachining
technology. Due to its low cost, small size, light weight and high resolution, MEMS has
been widely used in automobiles, medical health care, aerospace, consumer products and
RF communications. Nanotechnology refers to a field of applied science and technology
about materials and devices in the atomic and molecular scale, normally 1 to 100
nanometers. It can offer better built, longer lasting, cleanser, safer and smarter products
for home, communications, medicine, transportation, agriculture and many other fields.
MEMS and nanotechnology can be combined to create a new exciting field of NEMS
(Nanoelectromechanical system).
In order to introduce engineering students into this amazing micro and nanotechnology
field, we developed three corresponding graduate-level courses: Introduction to MEMS
(EE446) and Introduction to Nanotechnology (EE451), and Microelectronic Fabrication
(EE448). In addition, we have other related courses to support this program, such as EE
447: Semiconductor, EE 404: CMOS VLSI, EE 410: Bio-sensors, etc. This paper will
discuss the course structure, syllabuses, course modules, student feedbacks, as well as
future plans for this program. This curriculum offer students comprehensive knowledge
and experience in MEMS and nanotechnology. Students use various CAD tools such as
ANSYS FEM to design and simulate various MEMS/NEMS devices in the course
projects. Multimedia technology is also used during the classroom teaching. We played
vivid photos/videos to show the operation of MEMS/NEMS devices and state-of-the-art
micro/nano fabrication processes in industry. Students demonstrated tremendous interest
in this micro/nanotechnology program. The enrollment to these courses has been
overwhelming and we have to create extra sessions to accommodate students with strong
interest in this program. Our graduated students are well prepared for the industry in
micro/nanotechnology fields. This program can also be helpful for the effort of the
Connecticut Nanotechnology Curriculum Committee.
Description
© ASEE 2009
Citation
Publisher
ASEE