MEMS Gyroscope Research Based on UB Seed Grant
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Authors
Xiong, Xingguo
Issue Date
2011
Type
Presentation
Language
Keywords
Faculty research day
Alternative Title
Abstract
Description
In this poster, the research on a novel MEMS gyroscope device based on UB faculty seed grant support is introduced. MEMS (Micro-electro-mechanical Systems) vibratory gyroscopes have attracted tremendous interest among researchers due to their small size, low energy consumption, low cost and long life-time. In my research, I conceived a novel bulk-micromachined electrostatic comb-driven, differential capacitance sensing MEMS vibratory gyroscope based on glass-silicon-glass sandwich-structure. The novel structure eliminates the parasitic capacitances of the gyroscope, which greatly eases the signal sensing. Furthermore, due to the device structure design, the sensing vibration is not coupled to the driving vibration, which improves the device stability. The MEMS gyroscope research is funded by UB seed grant. Based on the research, we published 1 journal paper and 1 conference paper. The research also resulted in the submission of 4 grant proposals, leading to a total funding of $60,016.77.
Citation
Poster 44