A Bulk-Micromachined Comb Vibratory Microgyroscope Design
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Authors
Xiong, Xingguo
Lu, Deren
Wang, Weiyuan
Issue Date
2005-08-07
Type
Article
Language
Keywords
Microgyroscope , Bulk-micromachining , Deep reactive ion etching (DRIE) , Anodic-bonding , Computer engineering , Engineering , Micro-electro-mechanical systems (MEMS)
Alternative Title
Abstract
In this paper, a novel DRIE (Deep Reactive Ion Etching) bulk-micromachined single-crystal silicon comb vibratory microgyroscope is introduced. The device uses glass as substrate so that parasitic capacitance can be alleviated. Due to DRIE technique the device thickness can be increased to be more than 100μm. The working principle of the microgyroscope is introduced. The dynamics analysis of the gyroscope is also performed. Based upon the analysis, an optimized microgyroscope design is proposed. The designed gyroscope is expected to have a sensitivity of 4nm/(°/sec).
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Citation
Publisher
IEEE