Design And Simulation Of Aluminum Bi-Functional Spatial Light Modulator
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Authors
Xiong, Xingguo
Dallas, Tim
Gangopadhyay, Shubhra
Berg, Jordan
Henryk, Temkin
Issue Date
2005-08-07
Type
Article
Language
Keywords
Micro-electro-mechanical systems (MEMS) , Spatial light modulator , Micromirror (SLM) , Piston micro-mirror , Torsional mirror
Alternative Title
Abstract
In this paper, a bifunctional aluminum MEMS spatial light modulator (micromirror) device design is introduced. The bifunctional mirror can work in both torsional and piston modes, depending on the voltage applied to the bottom driving electrodes. The mirror was fabricated with thick photoresist sacrificial layer technique. The working principle and performance of the micromirror are analyzed. Based upon the analysis, an optimized micromirror design is proposed. The mirror can deflect for a maximum displacement of 1.3μm in its piston mode, and rotate for a maximum angle of 3.1° in its torsional mode. The micromirror can be used to modulate the phase as well as the direction of the incident light due to its bifunctional modes.
Description
Citation
Publisher
IEEE