Balance-Approach For Load-Displacement Measurement Of Microstructures
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Authors
Xiong, Xingguo
Zou, Qiang
Lu, Deren
Wang, Weiyuan
Issue Date
1998-08-01
Type
Article
Language
Keywords
Micromechanism , Young's modulus , Capacitive accelerometer , Engineering , Mechanical engineering
Alternative Title
Abstract
A simple and effective method using a balance to measure micro force and corresponding deflection is presented. The method is proved to be very practical in testing the force–deflection behavior of silicon cantilever, in which the Youngs modulus of the material can be calculated, and in investigating the static performance of bulk micromachined capacitive accelerometers. The same value of the Youngs modulus was obtained on much different microstructures including the single silicon cantilevers and the beam-island structures of capacitive accelerometers. The balance approach for micro force–displacement measurement is very attractive for its easiness in operation, low cost and higher resolution.
Description
Citation
X. Xiong, Q. Zou, D. Lu, W. Wang, "Balance-Approach For Load-Displacement Measurement Of Microstructures," Mechatronics, vol. 8, no. 5, Aug. 1998.
Publisher
Elsevier Science Ltd.