Balance-approach For Mechanical Properties Test of Micro Fabricated Structure
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Authors
Xiong, Xingguo
Zou, Qiang
Lu, Deren
Wang, Weiyuan
Issue Date
1997-09-29
Type
Article
Language
en_US
Keywords
Engineering , Micromechanism , Young’s modulus , Capacitive accelerometer
Alternative Title
Abstract
A simple and effective method using a balance to measure micro force and corresponding deflection is presented. The method is proved to be very practical in testing the force-deflection behavior of silicon cantilever, in which the Young’s modulus of the material can be calculated, and in investigating the static performance of bulk micromachined capacitive accelerometers. The balance approach for micro force-displacement measurement is very attractive for its easiness in operation, low cost and higher resolution.
Description
Copyright 1997 Society of Photo Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Citation
Xingguo Xiong ; Qiang Zou ; Deren Lu and Weiyuan Wang "Balance approach for mechanical properties test of microfabricated structures", Proc. SPIE 3223, Micromachining and Microfabrication Process Technology III, 294 (September 5, 1997); doi:10.1117/12.284493;
Publisher
SPIE