MEMS Yield Simulation with Monte Carlo Method
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Authors
Xiong, Xingguo
Wu, Yu-Liang
Jone, Wen-Ben
Issue Date
2007
Type
Article
Language
en_US
Keywords
Engineering , Micro-electro-mechanical systems (MEMS) , Built-in self-repair (BISR) , Yield , Monte Carlo method , Defect simulation
Alternative Title
Abstract
In this paper, Monte Carlo method is used for the simulation of point-stiction defects in MEMS accelerometer devices. The yield of MEMS devices is estimated based on the simulation results. Comparison between simulated yields of BISR/non-BISR MEMS accelerometers demonstrates effective yield increase due to self-repairable design. The simulation results of yield increase versus different initial yields for BISR MEMS accelerometers are in good agreement with theoretical prediction based on previous MEMS yield model. This verifies the correctness of the MEMS yield model.
Description
The final publication is available at www.springerlink.com
Citation
X. Xiong, Y. Wu, W. Jone, "MEMS Yield Simulation with Monte Carlo Method," Innovative Algorithms and Techniques in Automation, Industrial Electronics and Telecommunications, 2007.
Publisher
Springer Netherlands