Reliability Model for MEMS Accelerometers
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Authors
Xiong, Xingguo
Wu, Yu-Liang
Jone, Wen-Ben
Issue Date
2008
Type
Article
Language
en_US
Keywords
Engineering , Micro-electro-mechanical systems (MEMS) , Redundancy repair , Reliability , Accelerometer , Fracture probability
Alternative Title
Abstract
MEMS (Microelectromechanical System) reliability is a very critical issue for its commercial applications. In order to measure the reliability of MEMS, a systematic reliability model is required. In this paper, we developed a MEMS reliability model for quantitative assessment of the MEMS reliability analysis. Based on this model, we analyze the reliability of both BISR (built-in-self-repairable) and non-BISR MEMS comb accelerometers under Z-axis shocking environment. Simulation results demonstrate very effective reliability enhancement due to the BISR design. The reliability model can also be applied to other MEMS devices under various failure mechanisms in a similar way.
Description
The final publication is available at www.springerlink.com
Citation
Springer Netherlands
Publisher
Springer Netherlands