Reliability Model for MEMS Accelerometers

Abstract

MEMS (Microelectromechanical System) reliability is a very critical issue for its commercial applications. In order to measure the reliability of MEMS, a systematic reliability model is required. In this paper, we developed a MEMS reliability model for quantitative assessment of the MEMS reliability analysis. Based on this model, we analyze the reliability of both BISR (built-in-self-repairable) and non-BISR MEMS comb accelerometers under Z-axis shocking environment. Simulation results demonstrate very effective reliability enhancement due to the BISR design. The reliability model can also be applied to other MEMS devices under various failure mechanisms in a similar way.