A Self-repairable MEMS Comb Accelerometer
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Authors
Xiong, Xingguo
Wu, Yu-Liang
Jone, Wen-Ben
Issue Date
2010-12-10
Type
Article
Language
en_US
Keywords
Engineering , Micro-electro-mechanical systems (MEMS) , Built-in self-test (BIST) , Built-in self-repair (BISR) , Comb accelerometer , Yield analysis
Alternative Title
Abstract
In this paper, a built-in self-repair technique for the MEMS comb accelerometer device is proposed. The main device of the comb accelerometer consists of n identical modules, and m modules are introduced as the redundancy. If any of the working module in the main device is found faulty during a built-in self-test (BIST), the control circuit will replace it with a good redundant module. In this way, the faulty device can be self-repaired through redundancy. The implementation of dualmode BIST on the BISR module is discussed. The sensitivity loss due to device modularization can be well compensated by different design alternatives. The yield model for MEMS redundancy repair is developed. The simulation results show that the BISR (built-in self-repair) design leads to effective yield increase compared to non-BISR design, especially for a moderate non-BISR yield. The yield as well as the reliability of the accelerometer can be improved due to the redundancy repair.
Description
The final publication is available at www.springerlink.com
Citation
Publisher
Springer Netherlands