A Bulk-Micromachined Comb Accelerometer With Floating Interconnects
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Authors
Xiong, Xingguo
Lu, Deren
Wang, Weiyuan
Issue Date
2005-08-07
Type
Article
Language
Keywords
Micro-electro-mechanical systems (MEMS) , Accelerometer , Bulk-micromachining , Floating interconnect , Silicon on glass (SOG)
Alternative Title
Abstract
In this paper, a novel silicon-on-glass bulk micromachined comb accelerometer with floating interconnect is introduced. The device uses unique floating back interconnect for the connection of the fixed comb fingers, which leads to more compact design. Based upon the analysis of the device behavior, an optimized device design is proposed. Simulation results show that the device has a static capacitance of 2.8pF and sensitivity of 17.9nm/g. The fabrication sequence of the accelerometer is discussed. The novel floating interconnection technique may be applied to other bulk micromachined MEMS devices for 3D interconnection.
Description
Citation
Publisher
IEEE