Performance of a MIS Type Pd-Cr/AlN/Si Hydrogen Sensor
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Authors
Zhang, Linfeng
Al-Homoudi, Ibrahim A.
Rahman, Md H.
McCullen, Erik F.
Rimai, Lajos
Baird, Ron J.
Naik, Ratna
Newaz, Golam
Auner, Gregory W.
Ng, K.Y. Simon
Issue Date
2005
Type
Article
Language
en_US
Keywords
Hydrogen , Hydrogen sensor , Sensors
Alternative Title
Abstract
An MIS Hydrogen sensor with a Pd0.96Cr0.04/AlN/Si structure was fabricated, exhibiting the dynamic range considerably wider than that of analogous devices with pure Pd gates. A useful response could be obtained for Hydrogen concentrations as large as 50,000 ppm. Although the response amplitude was much reduced at the lower concentrations, satisfactory signal to noise down to 50 ppm could be obtained. The saturating magnitude of the electrical response is in the range of 0.1 to 0.5 V, which is the same as that for the pure Pd gated devices, inspite of the 3 orders of magnitude difference in the saturation hydrogen concentration. This result will be discussed in terms of the response mechanism of these devices.
Description
Citation
Publisher
Materials Research Society